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Multi-Wae Ellipsometer Multi-wave Ellipsometer

  • FS Multi-Wavelength Ellipsometer

    FS Multi-Wavelength Ellipsometer

    Combines an FS-1™ Multi-Wavelength Ellipsometer with beam focusing optics and a manual translation stage. The system is deal for manual inspection and quality control measurements on patterned semiconductor wafers.

    It performs R&D measurements with small spot size and camera imaging.

    Manual translation stage, accommodates 4", 5", and 6" wafer diameters.

    Beam size on sample: 0.3 x 0.7 mm.

    Video image of beam location on sample

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400-615-4535
400-615-4535