Multi-chamers System Multi-chamers System

• Multi-Chamber System

  

  ICP刻蚀机、RIE刻蚀机、PECVD和ICPECVD、真空装片装置或盒式载片台可以用3到6端口的传递腔室连接，实现多腔室系统供研发所用。 

   

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