Product Center

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  SiC growth furnace

  Silicon carbide crystal growth furnace

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  Plasma technology

  Plasma etching | Plasma deposition | Atomic layer deposition | Multi cavity system

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  PVD thin film deposition system

  Magnetron sputtering | Electron beam evaporation | Thermal evaporation | ibe | Multi cavity system

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  Electroplating technology

  Micro electroplating system | Rotary electroplating system | Electroplating system for display screen | Disk electroplating system | Waste liquid treatment system

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  Laser Technology

  Air cooled laser

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  Surface morphology analysis of materials

  optical microscope | scanning electron microscope | nanoindentation | Micro stretch instrument

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  Thin film measurement

  Multi wavelength ellipsograph | spectroscopic ellipsometer | Laser ellipsometer | Spectral reflector

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  Sputtering target and evaporating material

  Sputtering target and evaporating material