Multi-chamers & Hybrid Multi-chamers & Hybrid

• Multi-Chambers System

  

  Magnetron Sputtering MOS

  Deposition (electron beam and thermal evaporation) Ellipsometry

  Ion Milling              Secondary Ion Mass Spectrometry(SIMS)

  Ion Beam Deposition      Rapid Thermal Anneal

  Pulsed Laser Deposition   Oxygenation and Nitridization

  RHEED                 XPS/AUGER/LEED Analysis

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