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AJA International., Inc. has cylindrical (UHV) and box (HV) configuration of ATC-T series thermal evaporation systems. These systems are highly cost-effective with top-quality components. They inherit many designs and general components of ATC & ATC ORION sputtering system which are the same with HV or UHV. Besides, those systems can also be outfitted with single- or multi-pocket, liner or rotation electron beam evaporation sources, thermal evaporation sources, ion/plasma evaporation sources, Knudsen evaporation pool (MBE system), cryogenic evaporation tank of organic material, Radak evaporation sources and magnetron sputtering sources. What’s more, these systems can also be incorporated with load-lock, QCM (quartz crystal microbalance) supervisor and control, heated or cooled substrate holder, planetary gear, different vacuum pump packages and automatic control system.
Standard Thermal Evaporation System Configuration
ATC Orion 5-T
3 AJA thermal evaporation sources, with 850°C substrate heater
ATC Orion 8-T
Fitted with 3 Luxel Radak furnaces, a substrate heater up to 850 ℃ and turbo molecular pumpLoad-Lock
ATC 1800 T
Accommodates up to 4 Radak furnaces and 4 cm K&R gridded ion source for pre-cleaning and ion assisted thermal deposition. The sources include individual QCM isolation tubes to allow controlled co-deposition and an 850°C substrate heater.
ATC 2200-T UHV
Accommodates either 6 Radak Evaporation Furnaces or a 6 Pocket Linear E Beam Source on a convenient slide mechanism. It also features (6) QCM heads with isolation tubes for controlled co-deposition. A gridded ion source and numerous thermal sources are also offered.
ATC 2030-T Box Coater
Thermal box coater with LN2 substrate cooling, (4) AJA 300A thermal sources and a turbopumped vacuum load-lock..
