- Description
- Specifications
- Consultation
The Film Sense FS-1™ Multi-Wavelength Ellipsometer uses long-life LED’s and a no-moving-parts ellipsometric detector to provide fast and reliable thin film measurements in an easy-to-use, compact system. The film thickness of most transparent thin films from 0 – 1000 nm can be determined with excellent precision and accuracy by a simple 1 second measurement. Optical constants n & k and other film properties of samples can also be measured. The FS‑1 offers the powerful Multi-Wavelength Ellipsometry with an average price of single wavelength ellipsometer and spectroscopic reflectometer systems. The FS‑1 is ideal for measurements in the research lab, classroom, in situ process chambers, industrial quality control, and more.
Key Features
Multiple LED sources: Blue (465nm), Green (525nm), Yellow (580nm), and Red (635nm).
Excellent thickness precision, better than 0.001 nm for many samples (for a 1 second acquisition), even for sub-monolayer film thicknesses.
Integrated computer for instrument control and data analysis, with a web browser interface accessible from any modern computer, laptop, or tablet.
Advantages
FS-XY150
Typical time for wafer map: 60 seconds
(49 points on a 150 mm diameter wafer)
Compact footprint: 600×600 mm, 16 kg
Stage travel (X,Y): 150 x 150 mm, resolution: 5 μm
FS-RT300
Typical time for wafer map: 90 seconds(49 points on a 300 mm diameter wafer)
Compact footprint: 400×500 mm, 22 kg
Stage travel: R (linear) 150 mm, resolution: 12 μm
Theta (rotation) 360°, resolution: 0.1°
Software Control
FS-1 software can capture and analyze data of ellipsometer and report the parameter of samples (thickness, refractive index and so on). The FS-1 software runs on computer. The computer is integrated in the detection unit. The standard browser presents user’s page. Any desktop computer or laptop which support modern browser (Windows, Mac OS X, Linux, iOS, Android) can run FS-1 through Ethernet ( network is unnecessary). The biggest advantage of browser page is no need for software which obviously simplifies the installation of software and operation of programs.
Long working-lifetime (up to 50,000 hours), low-cost of LED exchange, short time for calibration and no need for PM program.
Fast measurement ( to get muilti-wavelength index within 10ms) and long-term stability.
Standard FS-1 Configuration
At 65°angle of incidence
Manual sample-loading and height-adjustment
Accommodates samples up to 200 mm in diameter, and up to 23 mm in thickness
Integrated sample tilt stage with ±2° range
Beam size on sample at 5×12mm
Compact frame (180×400mm) and light weight (4.8kg)
In-situ online measurment
Sub-monolayer thickness precision.
Determine deposition rates and film optical constants n&k, at multiple process conditions, without breaking vacuum.
Monitor and control the deposition of multilayer film structures.
FS-API interface for external software control (LabVIEW™ compatible).
Applicable to most thin film deposition techniques: Sputtering, ALD, MBE, MOCVD, e‑beam evaporation, etc.
FS-1 Mounted on AJA Sputter Chamber
Auto-Mapping System
These products combine an FS-1™ Multi-Wavelength Ellipsometer with compact mapping stages to provide fast, accurate, and reliable film thickness uniformity measurements across a wafer.
FS-XY150
Typical time for wafer map: 60 seconds (49 points on a 150 mm diameter wafer)
Compact footprint: 600×600 mm, 16 kg
Stage travel (X,Y): 150 x 150 mm, resolution: 5 μm
FS-RT300
Typical time for wafer map: 90 seconds(49 points on a 300 mm diameter wafer)
Compact footprint: 400×500 mm, 22 kg
Stage travel: R (linear) 150 mm, resolution: 12 μm
Theta (rotation) 360°, resolution: 0.1°
Software Control
FS-1 software can capture and analyze data of ellipsometer and report the parameter (thickness, refractive index and so on) of samples. The FS-1 software runs on computer. The computer is integrated in the detection unit. The standard browser presents user’s page. Any desktop computer or laptop which supports modern browser (Windows, Mac OS X, Linux, iOS, Android) can run FS-1 through Ethernet ( network is unnecessary). The biggest advantage of browser page is no need of software which obviously simplifies the installation of software and operation of programs.
Long working-lifetime (up to 50,000 hours), low-cost of LED exchange, short time for calibration and no need of PM program.
Fast measurement ( to get muilti-wavelength index within 10ms) and long-term stability.
Options
Focusing Option
Beam size on sample can be downsized to 0.8×1.9mm or 0.3×0.7mm
Focused Beam Detection
Combines an FS-1™ Multi-Wavelength Ellipsometer with beam focusing optics and a manual translation stage. The system is deal for manual inspection and quality control measurements on patterned semiconductor wafers.
It performs R&D measurements with small spot size and camera imaging.
Manual translation stage, accommodates 4", 5", and 6" wafer diameters.
Beam size on sample: 0.3 x 0.7 mm.
Video image of beam location on sample
