- Description
- Specifications
- Consultation
Spectral range: 350nm~850nm
Optional spectral range: 280nm~850nm
SE 800 sepctroscopic ellipsometer delivers high performance which adapts fast diodes array detector. Within the range of UV/visible light, the ellipsometer possesses the ability of fast data-capture and resolution of full spectral range.
Spectral ellipsometer SE 800 has complicated applications, such as the transparent thin film on glass, thin polymer film on luminary and semiconductor, multi-layer film on absorption/transparent substrates, anti-reflection film on window materials, and application in advanced mircro-electronics area, like SOI, materials of high or low k value. As well as anisotropic and non-uniform samples.
Key Characteristics
Working style of Step Scan Analyzer is true for dark light intensity.
Within the range from 0 to 360°, Composite Achromatic Compensator can figure out the angle accurately, analyze polarization factor and compensate depolarization.
Polarization-tracking technology offers the highest measuring accuracy for every application.
The auto-collimation lens is used to angle adjustment and microscope is applied to height adjustment for substrate stage. These two can create an extremely collimation accuracy for a sample.
Operation with high stability based on the newest computer basing on Windows XP, all hardware working controlled respectively by inner micro-controllers.
Spectoscopic ellipsometer software with powerful SpectraRay II.
