- Description
- Specifications
- Consultation
In the UV-VIS-NIR spectral range, SENTECH’ Reflectometer RM can analyze single-layer films, multi-layer films and substrate materials in a high precision and it can also analyze the thicknesses and refractive index.
Main Characteristics
Refractive index measurement with high precision, non-touching and normal incident light
Spectral range from UV to NIR
Measurement for reflectivity curve R, film thickness and refractive index
FTP expert software for optical parameter measurement of thin film
Measurement for components of semi-conductive compound (eg. AlGaN on GaN)
Analysis for anisotropic film
Options
Spectral range extended to DUV (200nm)
Spectral range extended to NIR (1700nm)
Sample stage and software with x-y mapping scan
Video amera
PC
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Model |
RM 1000 |
RM 2000 |
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Data measured |
Reflectivity R |
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Analysis and output |
Film thickness, refractive index and other data |
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Thickness range of film |
Up to 25μm |
Up to 50μm |
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Precision for film thickness |
Better than 1nm (for 400nm SiO/Si) Or better than 1% (for film thicker than 1000nm) |
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Accuracy （1σ） |
0.3nm (for 400nm SiO2/Si) |
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Time for measurement |
Typical 300ms |
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Spectral range |
450-920nm |
240-950nm |
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Diameter of facula |
80μm |
0.5mm |
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Light source |
Stabilized light source from deuterium or halogen lamp |
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Detector |
SMA spectrometer with SPDIF in Highly-performing photodiode array for spectral intensity measurement |
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Rack |
19"table control box |
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Power |
85...264VAC wide voltage range |
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Power interface |
IEC 60320-C14 (different interfaces for powers in different countries) |
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Network connector |
RJ-45 |
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Requirements for users’ PC |
Table PC, display, keyboard, mouse or laptop The lowest configuration: 600 MHz, 256 MB, 100Mbit network card (100Base-T), CD-ROM, WinXP windows |
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