- Description
- Specifications
- Consultation
Compact excimer laser of high repetition rate
Main Features
l High repetition (up to 1000Hz)
l TMC (Total-Metal-Ceramic) Vessel
l Preionization
l Solid state pulser
l Laser head volume < 3l
l Air-cooled, active thermal management
l Flushable optics holder
l Integrated vacuum pump & halogen filter
l Energy stabilization mode
l Meets European CE-standard
l RoHS compliance