Air-cooled Excimer Laser Air-cooled Excimer Lasers

ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Features

l Ultra compact size

l High repetition rate

l TMC (Total-Metal-Ceramic) Vessel

l Soft corona preionization

l Solid state switch

l Laser head volume < 3l

l Totally air-cooled, active thermal management

l Flushable optics holder

l 4 valves for system integration contributing to gas treatment

l RS-485, RS232, USB and fiber optic Interface for system integration

l Energy stabilization mode

l Meets European CE-standard

l RoHS compliance