- Description
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AJA has thermal evaporation systems with three different types: ATC-E, ATC ORION-E (better than ATC and ATC-Orion series) and PVDX (a cylindrical evaporation system with feed-through function). These systems deliver optimal performance and quality under a limited budget. They inherit many designs and general components of ATC & ATC ORION sputtering system which are the same with HV or UHV. Besides, those systems can be outfitted with single- or multi-pocket, liner or rotation electron beam evaporation sources, thermal evaporation sources, ion/plasma evaporation sources, Knudsen evaporation pool (MBE system), cryogenic evaporation tank of organic material, Radak evaporation sources and magnetron sputtering sources. What’s more, these systems can also be configured with load-lock, QCM (quartz crystal microbalance) supervisor and control, heated or cooled substrate holder, planetary gear, different vacuum pump packages and automatic control system.
Standard E-beam evaporation system configuration
ATC-ORION-8E UHV
Economical UHV sputtering system has a compact framework. There are liner E-beam evaporation sources or 5 pockets in the sliding mechanism, easy for loading and maintenance. The system is also featured by a load-lock with a turbo molecular pump.
ATC-2200-E
UHV e-beam evaporation system, 22" diameter and 36" high, with liner UHV e-beam sources of 5 pockets, 2 Radak thermal evaporator and a load-lock with a turbo molecular pump.
Rotation e-beam evaporation sources of 6 pockets, with load-lock, water cooled substrate holder and front radiant substrate heater.
ATC-2036-E HV
Rotation e-beam evaporation sources of 6 pockets, with 1000°C substrate heater and liner-controlled programmable substrate shutter applied to wedge film.
